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When nano- micro- structures are dried or change from the liquid to gaseous phase - a specimen can be damaged by high surface/ interfacial tension. Supercritical drying, also known as critical point drying, is a method to dry liquid without collapsing sample nano- micro structures. It is useful for MEMS, free-standing nanomembranes, aerogels, decaffeination of coffee and in the preparation of biological specimens.